Sixth International Conference on Hot-Wire Chemical Vapor Deposition (Cat-CVD) Process

HWCVD 2010

September 13-17, 2010, Ecole Polytechnique,
Palaiseau (near Paris), France

This conference is designed to promote synergies between Hot-Wire Chemical Vapor Deposition researchers working on different materials (semiconductors, metal oxides, organics, etc…) and addressing different applications (solar cells, sensors, industrial coatings, etc…).

HWCVD (also known as Catalytic CVD, Hot Filament CVD, and more recently Initiated CVD) allows to achieve high quality silicon related materials (amorphous, nanocrystalline, polycrystalline and epitaxial), silicon alloys (nitrides, oxides, carbides), passivation coatings, thin film diamond, hard coatings, nanostructured carbon, carbon nanotubes, transition metal oxide nano-particles, and polymers. Device applications of HWCVD films include thin film transistors, solar cells (photovoltaics), light emitting diodes, gas sensors, electrochromic windows, organic devices, and micromechanical structures. Contributions using Hot-Wire chambers for dry etching, surface passivation, or chamber cleaning are also welcome.

Common themes will be process fundamentals (nucleation, coalescence, surface roughening, etc…), technical improvements (filament lifetime, etc…), new developments (process, apparatus), and technology transfer (industrial implementation).

Conference location

Ecole Polytechnique, Amphitheater Pierre Faure, Palaiseau (near Paris), France

Key Dates / Schedule

Call for Abstract    March  01, 2010
Deadline for abstract submission    April  10, 2010
Notification of abstract acceptance     May  15, 2010
Advanced registration for attendees and exhibitions    August  15, 2010
Deadline for manuscript submission:     July  31, 2010


Abstracts

Please submit your abstract consisting of a maximum of 200 words. See the pdf template available on Abstract Submisson. When you submit the abstract, please indicate whether you prefer an oral or poster presentation.

Side event

The piano concert will be delivered by Katie Mahan. [Katie Mahan web site]

Registration Fees

Please read the information given below carefully. The deadline date August 15th corresponds to the local French date.

Advanced Registration before
August 15, 2010
(From Jul.5- August.15,2010)
Registration after
August 15, 2010
(From August.16- Sept.17,2010)
Student
 
235 euro 275 euro
Regular
(Conference)
350 euro 400 euro







Deadlines  

Call for abstract: March 1, 2010

Abstract submission: April 10, 2010

Notification of acceptance: May 15, 2010

Advanced registration: August 15, 2010

Deadline for manuscript submission: July 31, 2010



Links  

Ecole Polytechnique

Triangle de la Physique

Sponsors